ENTEGRIS INC
Current- Director 2024 to present
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Executive record
Alpha ID: alpha:person:mary-pumaVersion: public-0:d751713988987e9331980363e24189ceAs of: 2026-10-05
Not yet claimed8 published Claims4 sources
- Director
Leadership, in context.
Connect capital, control, accountability, and evidence.
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ResponsibilitiesInspect board appointments and committee mandates.ExperienceReview career history and qualifications in context.Economic interestsExamine disclosed incentives and ownership.Key Claims
Biography
Ms. Puma served as President and CEO of Axcelis Technologies from January 2002 until May 2023, bringing over 20 years of leadership experience in the semiconductor equipment industry. Prior to Axcelis, she held senior management roles at Eaton Corporation and spent 15 years in marketing and general management at General Electric.
Alpha editorial summary written from the cited sources below. It does not change any Claim on this record.
Board service
Boards
Claims
Experience
Experience coverage
No published Claims are available in this section of the public record. This does not establish that the information is undisclosed or that no relevant facts exist.
Review evidence coverageCompensation
Compensation coverage
No published Claims are available in this section of the public record. This does not establish that the information is undisclosed or that no relevant facts exist.
Review evidence coverageConflicts and accountability
Only disclosed facts and public registers appear here. Executive records carry no credit, personal litigation, background screening or underwriting views. None observed is not a clearance.
Evidence, history and coverage
Additional published Claims
Published evidence records
4 evidence records, matching Agent View. Records may refer to different locations or observations in the same document. This count is not a count of independent corroborating sources.
ENTG DEF 14A director slate
sec filing · Source published: Mar 23, 2026 · Retrieved: May 7, 2026
Supports 5 claims
- AI and ML experience: AI and ML experience: not identified in the cited filing · Claim reviewed: May 7, 2026
- Board role: Board role: Director · Claim reviewed: May 7, 2026
- Committee assignments: Committee assignments: Audit, Compensation · Claim reviewed: May 7, 2026
- Cybersecurity experience: Cybersecurity experience: not identified in the cited filing · Claim reviewed: May 7, 2026
- Technology background: Technology background reported in filings · Claim reviewed: May 7, 2026
Entegris Inc director board source
sec filing · Source published: Mar 23, 2026 · Retrieved: May 3, 2026
Supports 2 claims
- Board independence: Independent director · Claim reviewed: May 3, 2026
- Board membership: Serves on the board of Entegris Inc · Claim reviewed: May 3, 2026
Open source
sec proxy · Source published: Mar 23, 2026 · Retrieved: Apr 30, 2026
Supports 1 claim
- Professional Role: Director at ENTEGRIS INC · Claim reviewed: May 7, 2026
Open source
public source · Source published: Date unavailable · Retrieved: Date unavailable
Supports 1 claim
- Board membership: Serves on the board of Entegris Inc · Claim reviewed: May 3, 2026
No published record changes are available in this projection.
Identity
unclaimed
Evidence
corroborated
Evaluation
Unknown
Monitoring
Unknown
Authority
Unknown
Freshness
Observed 2026-10-05
- Biography
- published
- Board service
- published
- Executive career
- not observed
- Education and qualifications
- not observed
- Compensation
- not observed
- Conflicts and accountability
- published
- Background screening
- out of scope